发明申请
- 专利标题: MICROWAVE PLASMA ELECTRON FLOOD
- 专利标题(中): MICROWAVE PLASMA电子洪水
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申请号: US13010888申请日: 2011-01-21
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公开(公告)号: US20120187842A1公开(公告)日: 2012-07-26
- 发明人: William F. DiVergilio , Bo Vanderberg
- 申请人: William F. DiVergilio , Bo Vanderberg
- 申请人地址: US MA Beverly
- 专利权人: Axcelis Technologies, Inc.
- 当前专利权人: Axcelis Technologies, Inc.
- 当前专利权人地址: US MA Beverly
- 主分类号: H05H1/46
- IPC分类号: H05H1/46
摘要:
A method and apparatus is provided for generating a plasma electron flood using microwave radiation. In one embodiment, a microwave PEF apparatus is configured to generate a magnetic field that rapidly decays over a PEF cavity, resulting in a static magnetic field having a high magnetic field strength near one side (e.g., “bottom”) of the PEF cavity and a low magnetic field strength (e.g., substantially zero) near the opposite side (e.g., “top”) of the PEF comprising an elongated extraction slit. In one particular embodiment, the one or more permanent magnets are located at a position that is spatially opposed to the location of the elongated extraction slit to achieve the rapidly decaying magnetic field.The magnetic field results in an electron cyclotron frequency in a region of the cavity equal to or approximately equal to a microwave radiation frequency so that plasma is generated to diffuse through the extraction apertures.
公开/授权文献
- US08760054B2 Microwave plasma electron flood 公开/授权日:2014-06-24
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