发明申请
- 专利标题: PLANAR MAGNETIC FIELD PROBE
- 专利标题(中): 平面磁场探测器
-
申请号: US13115995申请日: 2011-05-26
-
公开(公告)号: US20120187944A1公开(公告)日: 2012-07-26
- 发明人: Shih-Chieh Chao , Chih-Wen Huang
- 申请人: Shih-Chieh Chao , Chih-Wen Huang
- 申请人地址: TW Taipei
- 专利权人: TATUNG COMPANY
- 当前专利权人: TATUNG COMPANY
- 当前专利权人地址: TW Taipei
- 优先权: TW100102043 20110120
- 主分类号: G01R33/02
- IPC分类号: G01R33/02
摘要:
A planar magnetic field probe is provided. The planar magnetic field probe increases the sensitivity of magnetic field intensity detection by using a left multi-sensor loop and a right multi-sensor loop formed by a first patterned metal layer and a second patterned metal layer, and decreases the electric field noise coupling by surrounding the left multi-sensor loop and the right multi-sensor loop with a symmetrical shielding metal structure formed by a first patterned shielding metal layer, a second patterned shielding metal layer and a plurality of through vias.
公开/授权文献
- US08575926B2 Planar magnetic field probe 公开/授权日:2013-11-05