发明申请
US20120188360A1 Microscope System, Surface State Observing Method, And Surface State Observing Program
有权
显微镜系统,表面状态观测方法和表面状态观测程序
- 专利标题: Microscope System, Surface State Observing Method, And Surface State Observing Program
- 专利标题(中): 显微镜系统,表面状态观测方法和表面状态观测程序
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申请号: US13346304申请日: 2012-01-09
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公开(公告)号: US20120188360A1公开(公告)日: 2012-07-26
- 发明人: Yoichi Okamoto , Takuya Karube
- 申请人: Yoichi Okamoto , Takuya Karube
- 申请人地址: JP Osaka
- 专利权人: KEYENCE CORPORATION
- 当前专利权人: KEYENCE CORPORATION
- 当前专利权人地址: JP Osaka
- 优先权: JP2011-012032 20110124
- 主分类号: H04N7/18
- IPC分类号: H04N7/18
摘要:
To provide a microscope system enabling the user to accurately observe the surface of the observing target in a short time. A sensitivity parameter for adjusting a value of the pixel data corresponding to a plurality of pixels is set. The pixel data is acquired with a first sensitivity value set as the sensitivity parameter, and the number of pixels in which the peak value of the pixel data is smaller than or equal to a threshold value is detected. A ratio of the detected number of pixels with respect to the total number of pixels region is calculated, where the pixel data is acquired by a second sensitivity value different from the first sensitivity value when the ratio is greater than or equal to a reference value, and the pixel data is not acquired by the second sensitivity value when the ratio is smaller than the reference value.
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