发明申请
US20120188360A1 Microscope System, Surface State Observing Method, And Surface State Observing Program 有权
显微镜系统,表面状态观测方法和表面状态观测程序

  • 专利标题: Microscope System, Surface State Observing Method, And Surface State Observing Program
  • 专利标题(中): 显微镜系统,表面状态观测方法和表面状态观测程序
  • 申请号: US13346304
    申请日: 2012-01-09
  • 公开(公告)号: US20120188360A1
    公开(公告)日: 2012-07-26
  • 发明人: Yoichi OkamotoTakuya Karube
  • 申请人: Yoichi OkamotoTakuya Karube
  • 申请人地址: JP Osaka
  • 专利权人: KEYENCE CORPORATION
  • 当前专利权人: KEYENCE CORPORATION
  • 当前专利权人地址: JP Osaka
  • 优先权: JP2011-012032 20110124
  • 主分类号: H04N7/18
  • IPC分类号: H04N7/18
Microscope System, Surface State Observing Method, And Surface State Observing Program
摘要:
To provide a microscope system enabling the user to accurately observe the surface of the observing target in a short time. A sensitivity parameter for adjusting a value of the pixel data corresponding to a plurality of pixels is set. The pixel data is acquired with a first sensitivity value set as the sensitivity parameter, and the number of pixels in which the peak value of the pixel data is smaller than or equal to a threshold value is detected. A ratio of the detected number of pixels with respect to the total number of pixels region is calculated, where the pixel data is acquired by a second sensitivity value different from the first sensitivity value when the ratio is greater than or equal to a reference value, and the pixel data is not acquired by the second sensitivity value when the ratio is smaller than the reference value.
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