发明申请
- 专利标题： REACTOR AND PLANT FOR THE CONTINUOUS PREPARATION OF HIGH-PURITY SILICON TETRACHLORIDE OR HIGH-PURITY GERMANIUM TETRACHLORIDE
- 专利标题（中）： 连续制备高纯度硅酮四氯化碳或高纯度德国四氯化碳的反应器和设备
-
申请号： US13447703申请日： 2012-04-16
-
公开(公告)号： US20120195804A1公开(公告)日： 2012-08-02
- 发明人: Jürgen LANG , Rainer NICOLAI , Hartwig RAULEDER
- 申请人： Jürgen LANG , Rainer NICOLAI , Hartwig RAULEDER
- 申请人地址： DE Essen
- 专利权人： EVONIK DEGUSSA GmbH
- 当前专利权人： EVONIK DEGUSSA GmbH
- 当前专利权人地址： DE Essen
- 优先权： DE102005041137.1 20050830
- 主分类号： B01J19/12
- IPC分类号： B01J19/12
摘要：
A reactor and a plant containing the reactor for conducting a continuous, industrial process for preparing high-purity silicon tetrachloride or high-purity germanium tetrachloride is provided. The plant contains a plasma reactor having a dielectric, a high voltage electrode and an earthed, metallic heat exchanger, in which the longitudinal axes of the dielectric, of the high-voltage electrode and of the earthed, metallic heat exchanger are oriented parallel to one another and at the same time parallel to the force vector of gravity.
公开/授权文献
信息查询
