发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 半导体器件及其制造方法
-
申请号: US13363268申请日: 2012-01-31
-
公开(公告)号: US20120196411A1公开(公告)日: 2012-08-02
- 发明人: Ryuta TSUCHIYA , Shinichiro Kimura
- 申请人: Ryuta TSUCHIYA , Shinichiro Kimura
- 专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人: RENESAS ELECTRONICS CORPORATION
- 优先权: JPJP2005-195748 20050705
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A device and a method for manufacturing the same in which with device includes a single crystal semiconductor substrate and an SOI substrate separated from the single crystal semiconductor substrate by a thin buried insulating film and having a thin single crystal semiconductor thin film (SOI layer) in which well diffusion layer regions, drain regions, gate insulating films, and gate electrodes of the SOI-type MISFET and the bulk-type MISFET are formed in the same steps. The bulk-type MISFET and the SOI-type MISFET are formed on the same substrate, so that board area is reduced and a simple process can be realized by making manufacturing steps of the SOI-type MISFET and the bulk-type MISFET common.
公开/授权文献
信息查询
IPC分类: