发明申请
- 专利标题： IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- 专利标题（中）： 印刷装置和制品制造方法
-
申请号： US13367500申请日： 2012-02-07
-
公开(公告)号： US20120199997A1公开(公告)日： 2012-08-09
- 发明人: Masayuki TANABE , Yasuyuki TAMURA , Yukio HANYU
- 申请人： Masayuki TANABE , Yasuyuki TAMURA , Yukio HANYU
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2011-023516 20110207
- 主分类号： B29C59/02
- IPC分类号： B29C59/02
摘要：
An imprint apparatus of the present invention that molds and cures an imprint material on a substrate using a mold to form a pattern on the substrate. The imprint apparatus includes a supply unit configured to supply a gas into a gap between the imprint material on the substrate and the mold. The supply unit is configured to supply a mixed gas in which a permeable gas, which permeates at least one of the mold, the imprint material and the substrate, and a condensable gas, which is liquefied under a pressure generated by the molding, is mixed with each other.
公开/授权文献
- US08672663B2 Imprint apparatus and article manufacturing method 公开/授权日：2014-03-18
信息查询
