发明申请
- 专利标题： ACOUSTIC WAVE DEVICE
- 专利标题（中）： 声波设备
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申请号： US13431642申请日： 2012-03-27
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公开(公告)号： US20120200195A1公开(公告)日： 2012-08-09
- 发明人: Tsuyoshi YOKOYAMA , Shinji TANIGUCHI , Tokihiro NISHIHARA , Masanori UEDA
- 申请人： Tsuyoshi YOKOYAMA , Shinji TANIGUCHI , Tokihiro NISHIHARA , Masanori UEDA
- 申请人地址： JP Tokyo
- 专利权人： TAIYO YUDEN CO., LTD.
- 当前专利权人： TAIYO YUDEN CO., LTD.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2009-223282 20090928
- 主分类号： H01L41/04
- IPC分类号： H01L41/04
摘要：
An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area.
公开/授权文献
- US08344590B2 Acoustic wave device with frequency control film 公开/授权日：2013-01-01
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