发明申请
- 专利标题: GAS DETECTOR
- 专利标题(中): 气体检测器
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申请号: US13025192申请日: 2011-02-11
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公开(公告)号: US20120204623A1公开(公告)日: 2012-08-16
- 发明人: Toshihiro Matsuno , Masaya Watanabe , Shoji Kitanoya
- 申请人: Toshihiro Matsuno , Masaya Watanabe , Shoji Kitanoya
- 专利权人: NGK SPARK PLUG CO., LTD
- 当前专利权人: NGK SPARK PLUG CO., LTD
- 主分类号: G01N25/18
- IPC分类号: G01N25/18
摘要:
A gas detector for use in, for example, measuring the concentration of flammable gas or detecting leakage of flammable gas. The gas detector has a gas detection element in which at least a heat-generating resistor and an insulation layer are laminated on a semiconductor substrate made of silicon while the insulation layer encloses the heat-generating resistor. The gas detector detects flammable gas on the basis of temperature and resistance of the heat-generating resistor which vary according to flammable gas. In the gas detection element, a protection layer in the form of a gas impermeable oxide film is provided on its outermost surface which comes into contact with an environmental atmosphere that contains flammable gas. Thus, alkali resistance is ensured. Since the protection layer is impermeable to gas, entry of impurities (organic silicon) contained in the environmental atmosphere into the protection layer is restrained, whereby output is stabilized and becomes accurate.
公开/授权文献
- US08826725B2 Gas detector 公开/授权日:2014-09-09
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