发明申请
US20120206216A1 ACOUSTIC WAVE DEVICE INCLUDING A SURFACE WAVE FILTER AND A BULK WAVE FILTER, AND METHOD FOR MAKING SAME
有权
包括表面波浪滤波器和大容量波形滤波器的声波装置及其制造方法
- 专利标题: ACOUSTIC WAVE DEVICE INCLUDING A SURFACE WAVE FILTER AND A BULK WAVE FILTER, AND METHOD FOR MAKING SAME
- 专利标题(中): 包括表面波浪滤波器和大容量波形滤波器的声波装置及其制造方法
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申请号: US13500614申请日: 2010-10-04
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公开(公告)号: US20120206216A1公开(公告)日: 2012-08-16
- 发明人: Chrystel Deguet , Laurent Clavelier , Emmanuel Defay , Alexandre Reinhardt
- 申请人: Chrystel Deguet , Laurent Clavelier , Emmanuel Defay , Alexandre Reinhardt
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Paris
- 优先权: FR0904845 20091009
- 国际申请: PCT/EP2010/064741 WO 20101004
- 主分类号: H03H9/205
- IPC分类号: H03H9/205 ; H03H3/02
摘要:
An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material.
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