发明申请
- 专利标题： DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
- 专利标题（中）： 缺陷检查装置和缺陷检查方法
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申请号： US13372868申请日： 2012-02-14
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公开(公告)号： US20120212605A1公开(公告)日： 2012-08-23
- 发明人: Go Maruyama , Masahiro Fujimoto , Sadao Takahashi , Jun Watanabe , Toshimichi Hagiya , Shin Aoki , Issei Abe , Shigeru Ouchida
- 申请人： Go Maruyama , Masahiro Fujimoto , Sadao Takahashi , Jun Watanabe , Toshimichi Hagiya , Shin Aoki , Issei Abe , Shigeru Ouchida
- 优先权： JP2011-032219 20110217; JP2011-240980 20111102
- 主分类号： H04N7/18
- IPC分类号： H04N7/18
摘要：
A defect inspection apparatus includes an imaging apparatus configured to include a lens array configure to include plural lenses arranged in a form of an array, and an imaging device configured to image a compound-eye image that is a collection of ommatidium images of an object approximately formed by the respective plural lenses of the lens array; and a processing apparatus configured to process the compound-eye image obtained from imaging the object by the imaging apparatus, and determine whether there is a defect of the object.