发明申请
- 专利标题: METHOD FOR PRODUCING MICROSTRUCTURE
- 专利标题(中): 生产微结构的方法
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申请号: US13501897申请日: 2010-10-14
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公开(公告)号: US20120214104A1公开(公告)日: 2012-08-23
- 发明人: Takaaki Suzuki , Hidetoshi Kotera , Isaku Kanno , Daisuke Hiramaru
- 申请人: Takaaki Suzuki , Hidetoshi Kotera , Isaku Kanno , Daisuke Hiramaru
- 申请人地址: JP KAGAWA JP KYOTO
- 专利权人: KAGAWA UNIVERSITY,KYOTO UNIVERSITY
- 当前专利权人: KAGAWA UNIVERSITY,KYOTO UNIVERSITY
- 当前专利权人地址: JP KAGAWA JP KYOTO
- 优先权: JP2009-237709 20091014
- 国际申请: PCT/JP2010/068047 WO 20101014
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
The disclosed method for producing a microstructure can form a complicated three-dimensionally formed microstructure with few steps.A first mask pattern (22) containing a light transmitting section and a light blocking section is disposed along an unexposed photosensitive resin (42), and a second mask pattern (32) containing a light transmitting section and a light blocking section is disposed on the reverse side of the first mask pattern (22) from the photosensitive resin (42). Additionally, by means of integrally rotating the photosensitive resin (42) and the first mask pattern (22) around a central axis (Z) that passes through the photosensitive resin (42) and the first mask pattern (22), and at the same time radiating exposure light from the reverse side of the second mask pattern (32) from the photosensitive resin (42) and the first mask pattern (22) in a direction that is inclined obliquely with respect to the direction of the central axis (Z), the light beam of the exposure light that is transmitted through the light transmitting section of the second mask pattern (32) and the light transmitting section of the first mask pattern (22) exposes the photosensitive resin (42).
公开/授权文献
- US08871433B2 Method for producing microstructure 公开/授权日:2014-10-28
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