发明申请
US20120218613A1 MEMS-SCANNING MIRROR DEVICE AND METHOD FOR MANUFACTURING THE SAME
审中-公开
MEMS扫描反射器件及其制造方法
- 专利标题： MEMS-SCANNING MIRROR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- 专利标题（中）： MEMS扫描反射器件及其制造方法
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申请号： US13466354申请日： 2012-05-08
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公开(公告)号： US20120218613A1公开(公告)日： 2012-08-30
- 发明人: Hirotake Maruyama , Makoto Fujino , Hirokazu Tamura
- 申请人： Hirotake Maruyama , Makoto Fujino , Hirokazu Tamura
- 优先权： JP2008-277897 20081029
- 主分类号： G02B26/10
- IPC分类号： G02B26/10
摘要：
An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.