发明申请
- 专利标题： MEMS-MICROPHONE
- 专利标题（中）： MEMS麦克风
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申请号： US13037503申请日： 2011-03-01
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公开(公告)号： US20120224726A1公开(公告)日： 2012-09-06
- 发明人: Wolfgang Pahl , Anton Leidl , Matthias Jungkunz , Andreas Beer
- 申请人： Wolfgang Pahl , Anton Leidl , Matthias Jungkunz , Andreas Beer
- 申请人地址： DE Munchen
- 专利权人： EPCOS AG
- 当前专利权人： EPCOS AG
- 当前专利权人地址： DE Munchen
- 主分类号： H04R1/00
- IPC分类号： H04R1/00
摘要：
A MEMS microphone having an improved noise performance due to reduced DC leakage current is provided. For that, a minimum distance between a signal line of the MEMS microphone and other conducting structures is maintained. Further, a DC guard structure fencing at least a section of the signal line is provided.
公开/授权文献
- US08611566B2 MEMS-microphone 公开/授权日：2013-12-17
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