发明申请
US20120228795A1 CERAMIC SUBSTRATE SUPPORTING MEMBER AND METHOD OF MANUFACTURING CERAMIC MEMBER
审中-公开
陶瓷基板支撑构件及制造陶瓷构件的方法
- 专利标题： CERAMIC SUBSTRATE SUPPORTING MEMBER AND METHOD OF MANUFACTURING CERAMIC MEMBER
- 专利标题（中）： 陶瓷基板支撑构件及制造陶瓷构件的方法
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申请号： US13414667申请日： 2012-03-07
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公开(公告)号： US20120228795A1公开(公告)日： 2012-09-13
- 发明人: Seiji MINOURA , Toshiki Ito , Kazuhiro Ito
- 申请人： Seiji MINOURA , Toshiki Ito , Kazuhiro Ito
- 申请人地址： JP Gifu
- 专利权人： IBIDEN CO., LTD.
- 当前专利权人： IBIDEN CO., LTD.
- 当前专利权人地址： JP Gifu
- 优先权： JP2011-050303 20110308
- 主分类号： B05C13/02
- IPC分类号： B05C13/02 ; B28B11/04
摘要：
There is provided a ceramic substrate supporting member configured to support a ceramic substrate at a tip portion thereof and used for forming a ceramic member coat on the ceramic substrate to manufacture a ceramic member in a reaction furnace. The ceramic substrate supporting member includes a core formed of graphite, and a supporting member coat formed at a surface including at least the tip portion with a pyrolytic carbon layer interposed between the core and the supporting member coat.