发明申请
- 专利标题: REGENERATIVE AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- 专利标题(中): 再生放大器,激光装置和极光超紫外光发生系统
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申请号: US13121319申请日: 2011-03-07
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公开(公告)号: US20120229889A1公开(公告)日: 2012-09-13
- 发明人: Takashi Suganuma , Krzysztof Nowak , Osamu Wakabayashi
- 申请人: Takashi Suganuma , Krzysztof Nowak , Osamu Wakabayashi
- 国际申请: PCT/JP2011/055861 WO 20110307
- 主分类号: H01S5/00
- IPC分类号: H01S5/00 ; H01S3/105
摘要:
A regenerative amplifier according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors constituting an optical resonator; a slab amplifier provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system disposed to configure a multipass optical path along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position as an optical image of the laser beam at a second position.
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