Invention Application
US20120231246A1 PROCESS FOR REMOVAL OF BACKSIDE COATING FROM SUBSTRATE 审中-公开
从衬底去除背面涂层的工艺

PROCESS FOR REMOVAL OF BACKSIDE COATING FROM SUBSTRATE
Abstract:
A process for producing plasma coated glass substrates free of back side coating (BSC) is provided. A low-E glass coated structure is also provided that uses a BSC as a protective coating that promotes transport and handling of low-E glass that is then subsequently delaminated. A thin film is deposited on the back side of the glass substrate before the top side of the glass is coated. Then, during the sputter down process, BSC occurs as normal and deposits over this back side film (BSF). In a subsequent process, outside the vacuum chamber, the glass back side is washed or otherwise delaminated. The BSF composition is selected to make the BSC easily removed in this wash process or other delamination process.
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