发明申请
- 专利标题： POROUS THREE DIMENSIONAL COPPER, TIN, COPPER-TIN, COPPER-TIN-COBALT, AND COPPER-TIN-COBALT-TITANIUM ELECTRODES FOR BATTERIES AND ULTRA CAPACITORS
- 专利标题（中）： 电池和超电容器的多孔三维铜，锡，铜箔，铜 - 钴和铜 - 钴 - 钛电极
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申请号： US13486202申请日： 2012-06-01
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公开(公告)号： US20120237823A1公开(公告)日： 2012-09-20
- 发明人: SERGEY D. LOPATIN , Dmitri A. BREVNOV , Robert Z. BACHRACH
- 申请人： SERGEY D. LOPATIN , Dmitri A. BREVNOV , Robert Z. BACHRACH
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： C25C7/00
- IPC分类号： C25C7/00 ; H01G9/00 ; H01M4/64
摘要：
A method and apparatus for forming a reliable and cost efficient battery or electrochemical capacitor electrode structure that has an improved lifetime, lower production costs, and improved process performance are provided. In one embodiment a method for forming a three dimensional porous electrode for a battery or an electrochemical cell is provided. The method comprises depositing a columnar metal layer over a substrate at a first current density by a diffusion limited deposition process and depositing three dimensional metal porous dendritic structures over the columnar metal layer at a second current density greater than the first current density.
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