发明申请
- 专利标题： COATING APPARATUS AND COATING METHOD
- 专利标题（中）： 涂装和涂装方法
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申请号： US13412910申请日： 2012-03-06
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公开(公告)号： US20120238075A1公开(公告)日： 2012-09-20
- 发明人: Hidenori Miyamoto , Tsutomu Sahoda
- 申请人： Hidenori Miyamoto , Tsutomu Sahoda
- 申请人地址： JP Kawasaki-shi
- 专利权人： TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人： TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址： JP Kawasaki-shi
- 主分类号： H01L21/208
- IPC分类号： H01L21/208 ; B05B1/02 ; B05B15/04
摘要：
A coating apparatus including a coating part which applies a liquid material containing an oxidizable metal and a solvent to a substrate; a chamber having a coating space in which the coating part applies the liquid material to the substrate and a transport space into which the substrate is transported; and a removal part which removes the liquid material from the atmosphere inside the chamber when a concentration of the solvent in the atmosphere inside the chamber exceeds a threshold value.