发明申请
- 专利标题： METHOD AND APPARATUS FOR PHYSICAL CONFINEMENT OF A LIQUID MENISCUS OVER A SEMICONDUCTOR WAFER
- 专利标题（中）： 液晶显示器半导体波形的物理限制方法与装置
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申请号： US13240657申请日： 2011-09-22
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公开(公告)号： US20120240963A1公开(公告)日： 2012-09-27
- 发明人: Enrico Magni , Eric Lenz
- 申请人： Enrico Magni , Eric Lenz
- 申请人地址： US CA Fremont
- 专利权人： Lam Research Corp.
- 当前专利权人： Lam Research Corp.
- 当前专利权人地址： US CA Fremont
- 主分类号： B08B3/04
- IPC分类号： B08B3/04 ; B23P17/04
摘要：
Systems, methods and apparatus for making a chemical head including forming a first return chamber in the chemical head, forming a second return chamber in the chemical head, forming a plurality of first return conduits from a head surface to the first return chamber, forming a plurality of second return conduits from a head surface to the second return chamber and wherein at least one of the first return conduits and the second return conduits being formed at a first angle relative to the head surface, the first angle being greater than about 20 degrees to a meniscus plane normal.
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