发明申请
- 专利标题: APPARATUS FOR DELIVERING A PROCESS GAS
- 专利标题(中): 提供过程气体的装置
-
申请号: US13436705申请日: 2012-03-30
-
公开(公告)号: US20120247581A1公开(公告)日: 2012-10-04
- 发明人: Iqbal A. Shareef , James V. Tietz , Vermon Wong , Richard J. Meinecke
- 申请人: Iqbal A. Shareef , James V. Tietz , Vermon Wong , Richard J. Meinecke
- 主分类号: F16K21/00
- IPC分类号: F16K21/00
摘要:
A processing system for delivering a process gas to a reaction chamber using a recipe having a recipe flow rate is provided. The processing system includes a gas flow delivery system configured for delivering the process gas, wherein said gas flow delivery system controlled by a mass flow controller (MFC) to an orifice. The predicted flow rate is previously computed by pressurizing a gas. The predicted flow rate further being previously computed measuring a set of upstream pressure values of the gas via at least one sensor. The processing system also includes a programmed computing device configured for applying a calibration factor of a set of calibration factors to determine the predicted flow rate, the calibration factor being a ratio of an average of the set of upstream pressure values to an average of a set of golden upstream pressure values.
公开/授权文献
- US08521461B2 Apparatus for delivering a process gas 公开/授权日:2013-08-27
信息查询