发明申请
- 专利标题： Oscillator Electrode Material Having Excellent Aging Characteristics, Piezoelectric Oscillator Using The Material And Sputtering Target Comprising The Material
- 专利标题（中）： 具有优异老化特性的振荡器电极材料，使用包含材料的材料和溅射靶的压电振荡器
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申请号： US13516365申请日： 2010-04-28
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公开(公告)号： US20120248943A1公开(公告)日： 2012-10-04
- 发明人: Toshinori Ogashiwa , Masaaki Kurita , Takashi Terui , Takayuki Sagae , Katsunori Akane , Kenzo Okamoto , Kenichi Ueki , Shohei Takeda
- 申请人： Toshinori Ogashiwa , Masaaki Kurita , Takashi Terui , Takayuki Sagae , Katsunori Akane , Kenzo Okamoto , Kenichi Ueki , Shohei Takeda
- 优先权： JP2009-295350 20091225
- 国际申请： PCT/JP2010/057606 WO 20100428
- 主分类号： H01L41/16
- IPC分类号： H01L41/16 ; C23C14/34 ; C22C30/00 ; C23C14/14 ; C22C5/02 ; C22C5/06
摘要：
An electrode material capable of making more satisfactory the dispersion at the time of production and the aging property of a resonator than Au and capable of reducing the price as compared to Au. An resonator electrode material including a ternary alloy composed of Au and two metals M1 and M2, and being used as an excitation electrode to excite oscillation in a piezoelectric element, wherein the two metals M1 and M2 are, respectively, (a) metal M1: a metal exhibiting a tendency to decrease the temporal frequency property (Δf1/f1) from the reference value f1, and (b) metal M2: a metal exhibiting a tendency to increase the temporal frequency property (Δf1/f1) from the reference value f1. The metal M1 is preferably at least any one of Ag, Al and Ni, and the metal M2 is preferably at least any one of Pd, Ru, Pt, Ir, Rh and Cu.
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