发明申请
- 专利标题： OPTICAL BEAM DEFLECTING ELEMENT, ILLUMINATION SYSTEM INCLUDING SAME, AND RELATED METHOD
- 专利标题（中）： 光束偏转元件，包括其的照明系统及相关方法
-
申请号： US13358158申请日： 2012-01-25
-
公开(公告)号： US20120249988A1公开(公告)日： 2012-10-04
- 发明人: Daniel Runde , Florian Doll , Reinhard Voelkel , Kenneth Weible , Gundula Weiss , Michael Gerhard
- 申请人： Daniel Runde , Florian Doll , Reinhard Voelkel , Kenneth Weible , Gundula Weiss , Michael Gerhard
- 申请人地址： DE Oberkcochen
- 专利权人： CARL ZEISS SMT GMBH
- 当前专利权人： CARL ZEISS SMT GMBH
- 当前专利权人地址： DE Oberkcochen
- 主分类号： G03B27/54
- IPC分类号： G03B27/54 ; G03B27/32 ; G02B26/08
摘要：
An optical beam deflecting element may be used effectively as an energy distribution manipulator in an illumination system to vary the energy distribution within a given spatial intensity distribution in a pupil plane of the illumination system substantially without changing the shape and size and position of illuminated areas in the pupil plane.
公开/授权文献
信息查询
