Invention Application
- Patent Title: Micromechanical system and corresponding manufacturing method
- Patent Title (中): 微机械系统及相应的制造方法
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Application No.: US13434486Application Date: 2012-03-29
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Publication No.: US20120251799A1Publication Date: 2012-10-04
- Inventor: Jochen REINMUTH , Andreas SCHEURLE , Christian BIERHOFF
- Applicant: Jochen REINMUTH , Andreas SCHEURLE , Christian BIERHOFF
- Priority: DE102011006403.6 20110330
- Main IPC: B32B7/14
- IPC: B32B7/14 ; B44C1/22

Abstract:
A micromechanical system is described having a substrate; a first micromechanical functional area, which is situated above the substrate; a second micromechanical functional area, which is situated above the first micromechanical functional area and is connected via a first weblike anchoring structure to the first micromechanical functional area; a third micromechanical functional area, which is situated above the second micromechanical functional area, and which has a first subarea and a second subarea; the first subarea being connected via a second weblike anchoring structure to the second micromechanical functional area; and the second subarea being mounted floating over the substrate by the first subarea. The invention also provides a method for manufacturing such a micromechanical system.
Public/Granted literature
- US09309107B2 Micromechanical system and corresponding manufacturing method Public/Granted day:2016-04-12
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