发明申请
- 专利标题： ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF
- 专利标题（中）： 抗反射涂料组合物及其工艺
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申请号： US13075749申请日： 2011-03-30
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公开(公告)号： US20120251943A1公开(公告)日： 2012-10-04
- 发明人: M. Dalil Rahman , Douglas McKenzie , Jianhui Shan , Joon Yeon Cho , Salem K. Mullen
- 申请人： M. Dalil Rahman , Douglas McKenzie , Jianhui Shan , Joon Yeon Cho , Salem K. Mullen
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03F7/004 ; C09K3/00
摘要：
The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1): A-B—C (1) where A is a fused aromatic ring, B has a structure (2), and C is a hydroxybiphenyl of structure (3) where R1 is C1-C4alkyl and R2 is C1-C4alkyl.The invention further relates to a process for forming an image using the composition.
公开/授权文献
- US2633972A Check weigher 公开/授权日：1953-04-07
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