Invention Application
- Patent Title: METHOD OF CONTROLLING OPERATION OF A PROCESSING SYSTEM
- Patent Title (中): 控制加工系统运行的方法
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Application No.: US13495350Application Date: 2012-06-13
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Publication No.: US20120253500A1Publication Date: 2012-10-04
- Inventor: James Robert Smith , Michael Roger Czerniak , Nigel James Gibbins
- Applicant: James Robert Smith , Michael Roger Czerniak , Nigel James Gibbins
- Priority: GB0412623.1 20040607
- Main IPC: G05B19/18
- IPC: G05B19/18

Abstract:
In a method of controlling operation of a processing system, a host computer, a process tool and a component of an evacuation system, for example an abatement tool, are connected to a system bus. The abatement tool monitors signals transmitted on the system bus between the host computer and the process tool, and signals received directly from the process tool. The abatement tool uses information contained within the monitored signals to generate a signal for the process tool regarding an operating characteristic of the abatement tool. This signal is transmitted either directly or over the system bus to the process tool, which uses the generated signal to control an operating state of the process tool.
Public/Granted literature
- US09081379B2 Evacuation system alerts based on process tool systems bus monitoring Public/Granted day:2015-07-14
Information query
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