发明申请
- 专利标题: Nanopillar Decoupling Capacitor
- 专利标题(中): 纳米棒去耦电容器
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申请号: US13530549申请日: 2012-06-22
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公开(公告)号: US20120256294A1公开(公告)日: 2012-10-11
- 发明人: Satya N. Chakravarti , Dechao Guo , Huiming Bu , Keith Kwong Hon Wong
- 申请人: Satya N. Chakravarti , Dechao Guo , Huiming Bu , Keith Kwong Hon Wong
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L29/02
- IPC分类号: H01L29/02 ; H01L21/02
摘要:
Techniques for incorporating nanotechnology into decoupling capacitor designs are provided. In one aspect, a decoupling capacitor is provided. The decoupling capacitor comprises a first electrode; an intermediate layer adjacent to the first electrode having a plurality of nanochannels therein; a conformal dielectric layer formed over the intermediate layer and lining the nanochannels; and a second electrode at least a portion of which is formed from an array of nanopillars that fill the nanochannels in the intermediate layer. Methods for fabricating the decoupling capacitor are also provided, as are semiconductor devices incorporating the decoupling capacitor design.
公开/授权文献
- US08680651B2 Nanopillar decoupling capacitor 公开/授权日:2014-03-25