发明申请
- 专利标题: PATTERN TRANSFER APPARATUS AND PATTERN TRANSFER METHOD
- 专利标题(中): 图案转印装置和图案转印方法
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申请号: US13414959申请日: 2012-03-08
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公开(公告)号: US20120256353A1公开(公告)日: 2012-10-11
- 发明人: Mitsuru HASEGAWA , Hajime Murakami , Akihiro Miyauchi , Masahiko Ogino
- 申请人: Mitsuru HASEGAWA , Hajime Murakami , Akihiro Miyauchi , Masahiko Ogino
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 优先权: JP2011-086252 20110408
- 主分类号: B29C59/02
- IPC分类号: B29C59/02 ; B29C71/04 ; B29C71/00 ; B29C37/00 ; B29C59/04
摘要:
A pattern transfer apparatus for pressing a mold having a fine concave/convex pattern onto a transferred material, peeling off the mold from the transferred material, and transferring the concave/convex pattern onto a surface of the transferred material includes: a pretreatment mechanism configured to perform a predetermined surface treatment to at least one of the mold and the transferred material before the concave/convex pattern is transferred; an information recording mechanism configured to record information of the surface treatment performed by the pretreatment mechanism at a position associated with an area of the transferred material where the concave/convex pattern is transferred onto the area; an interpretation mechanism configured to read the recorded information; and an after-treatment mechanism configured to perform a predetermined after-treatment to the area where the concave/convex pattern is transferred, based on the information interpreted by the interpretation mechanism.