发明申请
- 专利标题： ROBOTIC DEVICE FOR SUBSTRATE TRANSFER APPLICATIONS
- 专利标题（中）： 用于基板传送应用的机器人设备
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申请号： US13084435申请日： 2011-04-11
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公开(公告)号： US20120256435A1公开(公告)日： 2012-10-11
- 发明人: DAVID J. ALTKNECHT , ROBERT E. ERICKSON , STUART STEPHEN PAPWORTH PARKIN , CHRISTOPHER O. LADA , MAHESH SAMANT
- 申请人： DAVID J. ALTKNECHT , ROBERT E. ERICKSON , STUART STEPHEN PAPWORTH PARKIN , CHRISTOPHER O. LADA , MAHESH SAMANT
- 申请人地址： US NY ARMONK
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY ARMONK
- 主分类号： H01L21/68
- IPC分类号： H01L21/68 ; H01L21/677
摘要：
A device for use in the semiconductor industry includes a robotic arm whose end effector includes at least two prongs designed to hold a substrate carrier. A pushing member located between the prongs can move independently of the prongs and is configured to exert force against the substrate carrier while the prongs are retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the prongs are retracted. Each of the prongs may include a claw or gripping member for grasping the substrate carrier.
公开/授权文献
- US08657352B2 Robotic device for substrate transfer applications 公开/授权日：2014-02-25
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