Invention Application
- Patent Title: OPTICAL IMAGE MEASUREMENT APPARATUS AND OPTICAL ATTENUATOR
- Patent Title (中): 光学图像测量装置和光学衰减器
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Application No.: US13518240Application Date: 2010-11-16
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Publication No.: US20120257212A1Publication Date: 2012-10-11
- Inventor: Shigeru Okikawa , Tomoyoshi Abe
- Applicant: Shigeru Okikawa , Tomoyoshi Abe
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOPCON
- Current Assignee: KABUSHIKI KAISHA TOPCON
- Current Assignee Address: JP Tokyo
- Priority: JP2009-293978 20091225
- International Application: PCT/JP2010/006718 WO 20101116
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G02B26/02

Abstract:
A cam face 303a of a cam 303 has a shape depending on the distribution of the light amount in the cross-section of reference light LR. When the cam 303 is rotated by a stepping motor 302, an abutment 312 moves following the displacement of the cam face 302a with the rotation of the cam 303. A light-blocking link 310 rotates about the axis of rotation 311 with the movement of the abutment 312. A shield 313 moves in a first direction with the rotation of the light-blocking link 310 to change the shielding region of the reference light LR. A light-blocking plate 400 can shield the reference light LR from a second direction different from a shielding direction (first direction) by an attenuator 300. The light-blocking plate 400 is moved by a drive mechanism 410 and changes the shielding region.
Public/Granted literature
- US09072457B2 Optical image measurement apparatus and optical attenuator Public/Granted day:2015-07-07
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