发明申请
- 专利标题: FLASH MEMORY AND METHOD FOR FABRICATING THE SAME
- 专利标题(中): 闪存及其制造方法
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申请号: US13389720申请日: 2011-10-14
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公开(公告)号: US20120261740A1公开(公告)日: 2012-10-18
- 发明人: Yimao Cai , Ru Huang , Shiqiang Qin , Poren Tang , Shenghu Tan
- 申请人: Yimao Cai , Ru Huang , Shiqiang Qin , Poren Tang , Shenghu Tan
- 申请人地址: CN Beijing
- 专利权人: PEKING UNIVERSITY
- 当前专利权人: PEKING UNIVERSITY
- 当前专利权人地址: CN Beijing
- 优先权: CN201110092483.9 20110413
- 国际申请: PCT/CN11/80769 WO 20111014
- 主分类号: H01L29/788
- IPC分类号: H01L29/788 ; H01L21/336
摘要:
The present invention discloses a flash memory and a method for fabricating the same, and relates to the technical field of the semiconductor memory. The flash memory includes a buried oxygen layer on which a source terminal, a channel, and a drain terminal are disposed, wherein the channel is between the source terminal and the drain terminal, and a tunneling oxide layer, a polysilicon floating gate, a blocking oxide layer, and a polysilicon control gate are sequentially disposed on the channel, and a thin silicon nitride layer is disposed between the source terminal and the channel. The method includes: 1) performing a shallow trench isolation on a SOI silicon substrate to form an active region; 2) sequentially forming a tunneling oxide layer and a first polysilicon layer on the SOI silicon substrate to form a polysilicon floating gate, and forming a blocking oxide layer and a second polysilicon layer to form a polysilicon control gate; 3) etching the resultant structure to form a gate stack structure; 4) forming a drain terminal at one side of the gate stack structure, etching the silicon film at the other side of the gate stack structure, growing a thin silicon nitride layer, and then refilling the hole structure with silicon material, to form a source terminal. The method has the advantages of high programming efficiency, low power consumption, effectively preventing source-drain punchthrough effect.
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