发明申请
US20120263206A1 SURFACE-EMISSION LASER DIODE AND FABRICATION PROCESS THEREOF 有权
表面发射激光二极管及其制造工艺

SURFACE-EMISSION LASER DIODE AND FABRICATION PROCESS THEREOF
摘要:
A surface-emission laser diode includes a GaAs substrate, a cavity region, and upper and lower reflectors provided at a top part and a bottom part of the cavity region, the upper reflector and/or the lower reflector including a semiconductor Bragg reflector, at least a part of the semiconductor distributed Bragg reflector includes a semiconductor layer containing Al, Ga and As as major components, there being provided, between the active layer and the semiconductor layer that contains Al, Ga and As as major components, a semiconductor layer containing Al, In and P as major components adjacent to the semiconductor layer that contains Al, Ga and As as major components, with an interface formed coincident to a location of a node of electric strength distribution.
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