Invention Application
- Patent Title: COMPLEMENTARY TUNNELING FIELD EFFECT TRANSISTOR AND METHOD FOR FORMING THE SAME
- Patent Title (中): 补充隧道场效应晶体管及其形成方法
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Application No.: US13386581Application Date: 2011-11-28
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Publication No.: US20120267609A1Publication Date: 2012-10-25
- Inventor: Renrong Liang , Jun Xu , Jing Wang
- Applicant: Renrong Liang , Jun Xu , Jing Wang
- Applicant Address: CN Beijing
- Assignee: TSINGHUA UNIVERSITY
- Current Assignee: TSINGHUA UNIVERSITY
- Current Assignee Address: CN Beijing
- Priority: CN201110086616.1 20110407
- International Application: PCT/CN11/83069 WO 20111128
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238

Abstract:
A complementary tunneling field effect transistor and a method for forming the same are provided. The complementary tunneling field effect transistor comprises: a substrate; an insulating layer, formed on the substrate; a first semiconductor layer, formed on the insulating layer and comprising first and second doped regions; a first type TFET vertical structure formed on a first part of the first doped region and a second type TFET vertical structure formed on a first part of the second doped region, in which a second part of the first doped region is connected with a second part of the second doped region and a connecting portion between the second part of the first doped region and the second part of the second doped region is used as a drain output; and a U-shaped gate structure, formed between the first type TFET vertical structure and the second type TFET vertical structure.
Public/Granted literature
- US08653504B2 Complementary tunneling field effect transistor and method for forming the same Public/Granted day:2014-02-18
Information query
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