发明申请
US20120276291A1 Methods and Apparatuses for Reducing Gelation of Glass Precursor Materials During Vaporization 审中-公开
用于在蒸发期间还原玻璃前体材料的凝胶化的方法和装置

Methods and Apparatuses for Reducing Gelation of Glass Precursor Materials During Vaporization
摘要:
Methods and apparatuses for vaporizing liquid precursor material for use in a vapor deposition process are disclosed. The method for vaporizing liquid precursor material includes introducing a flow of liquid precursor material into an expansion chamber and directing the flow of liquid precursor material towards a wall of the chamber. The wall of the chamber is heated to a temperature sufficient to vaporize a first portion of the flow of liquid precursor material while a second portion of the flow of liquid precursor material remains in a liquid state and a third portion of the liquid precursor material is formed into gel. The expansion chamber is continuously drained as the flow of liquid precursor material is introduced into the expansion chamber. The chamber is heated to a temperature to produce a sufficient amount of the second portion of the liquid precursor material to flush the gel from the chamber.
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