发明申请
- 专利标题: TRANSPARENT PHOTODETECTOR
- 专利标题(中): 透明光电
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申请号: US13099827申请日: 2011-05-03
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公开(公告)号: US20120280203A1公开(公告)日: 2012-11-08
- 发明人: Tymon Barwicz
- 申请人: Tymon Barwicz
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L31/0352
- IPC分类号: H01L31/0352 ; B82Y20/00
摘要:
A transparent photodetector. The transparent photodetector includes a substrate; a waveguide on the substrate; a displaceable structure that can be displaced with respect to the substrate, the displaceable structure in proximity to the waveguide; and a silicon nanowire array suspended with respect to the substrate and mechanically linked to the displaceable structure, the silicon nanowire array comprising a plurality of silicon nanowires having piezoresistance. In operation, a light source propagating through the waveguide results in an optical force on the displaceable structure which further results in a strain on the nanowires to cause,a change in electrical resistance of the nanowires. The substrate may be a semiconductor on insulator substrate.
公开/授权文献
- US08604574B2 Transparent photodetector 公开/授权日:2013-12-10
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