发明申请
US20120280203A1 TRANSPARENT PHOTODETECTOR 有权
透明光电

TRANSPARENT PHOTODETECTOR
摘要:
A transparent photodetector. The transparent photodetector includes a substrate; a waveguide on the substrate; a displaceable structure that can be displaced with respect to the substrate, the displaceable structure in proximity to the waveguide; and a silicon nanowire array suspended with respect to the substrate and mechanically linked to the displaceable structure, the silicon nanowire array comprising a plurality of silicon nanowires having piezoresistance. In operation, a light source propagating through the waveguide results in an optical force on the displaceable structure which further results in a strain on the nanowires to cause,a change in electrical resistance of the nanowires. The substrate may be a semiconductor on insulator substrate.
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