发明申请
- 专利标题： SEMICONDUCTOR FILM AND PHOTOELECTRIC CONVERSION DEVICE
- 专利标题（中）： 半导体膜和光电转换器件
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申请号： US13519984申请日： 2010-12-28
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公开(公告)号： US20120280242A1公开(公告)日： 2012-11-08
- 发明人: Yoshiyuki Nasuno , Kazuhito Nishimura , Takanori Nakano
- 申请人： Yoshiyuki Nasuno , Kazuhito Nishimura , Takanori Nakano
- 优先权： JP2009299094 20091229
- 国际申请： PCT/JP2010/073747 WO 20101228
- 主分类号： H01L31/036
- IPC分类号： H01L31/036 ; H01L29/04
摘要：
There is provided a semiconductor film formed on a surface of a substrate and containing a crystalline substance, wherein the semiconductor film has a central region including a center of a surface of the semiconductor film and a peripheral region located around the central region, and a crystallization ratio in the peripheral region of the semiconductor film is higher than a crystallization ratio in the central region. There is also provided a photoelectric conversion device including the semiconductor film.