Invention Application
US20120281238A1 Optical Position-Measuring Device 有权
光学位置测量装置

  • Patent Title: Optical Position-Measuring Device
  • Patent Title (中): 光学位置测量装置
  • Application No.: US13463438
    Application Date: 2012-05-03
  • Publication No.: US20120281238A1
    Publication Date: 2012-11-08
  • Inventor: Michael Hermann
  • Applicant: Michael Hermann
  • Priority: DE102011075286.2 20110505
  • Main IPC: G01B11/14
  • IPC: G01B11/14
Optical Position-Measuring Device
Abstract:
An optical position-measuring device for detecting the relative position of two objects includes a measuring standard connected to one object, and a scanning unit connected to the other object and including a light source, one or more grating(s), and a detector system. The detector system includes a plurality of detector element groups arranged in a detection plane, via which a plurality of position-dependent, phase-shifted scanning signals is able to be generated by scanning a periodic fringe pattern that results in the detection plane, the detector elements that have in-phase scanning signals forming a group in each case. The sum of the areas and the centroid of the detector elements of a group is identical to the sum of the areas and the centroid, respectively, of the detector elements of each other group. Periodic diaphragm structures are arranged in front of the light-sensitive areas of the detector elements.
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