发明申请
- 专利标题: Devices and Methods for Analyzing Surfaces
- 专利标题(中): 用于分析曲面的设备和方法
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申请号: US13105605申请日: 2011-05-11
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公开(公告)号: US20120286151A1公开(公告)日: 2012-11-15
- 发明人: Joseph A. Jarrell , Michael P. Balogh
- 申请人: Joseph A. Jarrell , Michael P. Balogh
- 申请人地址: US MA Milford
- 专利权人: WATERS TECHNOLOGIES CORPORATION
- 当前专利权人: WATERS TECHNOLOGIES CORPORATION
- 当前专利权人地址: US MA Milford
- 主分类号: H01J49/26
- IPC分类号: H01J49/26 ; H01J49/10
摘要:
Embodiments of the present invention are directed to devices and methods for performing an analysis of a sample having a sample surface. The device and method feature a frame element affixed to a sample holder, jet element and a charged particle analyzer having an ion receiving orifice. The jet element directs a jet of gas towards the sample surface held by said sample holder focused on less than 2.0 mm2 of the sample surface. Ions formed by the electrode means are received by a charged particle analyzer having a ion receiving orifice for receiving one or more sample ions and performing a charged particle analysis with respect to the sample surface. The sample holder moves with respect to the jet element, and charged particle analyzer to permit scanning of a sample surface.
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