发明申请
- 专利标题: Method for Producing a Connection Region on a Side Wall of a Semiconductor Body
- 专利标题(中): 在半导体主体的侧壁上产生连接区域的方法
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申请号: US13468748申请日: 2012-05-10
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公开(公告)号: US20120289047A1公开(公告)日: 2012-11-15
- 发明人: Carsten Ahrens , Berthold Schuderer , Stefan Willkofer
- 申请人: Carsten Ahrens , Berthold Schuderer , Stefan Willkofer
- 申请人地址: DE Neubiberg
- 专利权人: INFINEON TECHNOLOGIES AG
- 当前专利权人: INFINEON TECHNOLOGIES AG
- 当前专利权人地址: DE Neubiberg
- 优先权: DE102011101035.5 20110510
- 主分类号: H01L21/768
- IPC分类号: H01L21/768
摘要:
A method for producing a connection region on a side wall of a semiconductor body is disclosed. A first trench is produced on a first surface of a semiconductor body and extends into the semiconductor body. An insulation layer is formed on the side walls and on the bottom of the first trench, and the first trench is only partially filled. The unfilled part of the first trench is filled with an electrically conductive material. A separating trench is produced along the first trench in such a way that a side wall of the separating trench directly adjoins the first trench. The part of the insulation layer which adjoins the separating trench is at least partially removed, with the result that at least some of the electrically conductive material in the first trench is exposed.
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