Provided is a method of fabricating a nano particle complex catalyst including generating a plasma ion of a solid element and performing plasma ion implantation to carry a catalyst component of the solid element in a porous carrier. In the method, a pulse direct current voltage is applied to the deposition source to generate the plasma ion of the solid element, and a synchronized voltage is applied to the porous carrier, thereby instantly applying a pulse high voltage to the solid element. The ionized solid element is accelerated toward the porous carrier by the pulse high voltage instantly applied to the solid element, thereby performing the ion implantation.