发明申请
US20120295414A1 METHODS FOR PRODUCING STACKED ELECTROSTATIC DISCHARGE CLAMPS 有权
用于生产堆积静电排放夹的方法

METHODS FOR PRODUCING STACKED ELECTROSTATIC DISCHARGE CLAMPS
摘要:
Methods are provided for producing stacked electrostatic discharge (ESD) clamps. In one embodiment, the method includes providing a semiconductor substrate in which first and second serially-coupled transistors are formed. The first transistor includes a first well region having a first lateral edge partially forming the first transistor's base. The second transistor including a second well region having a second lateral edge partially forming the second transistor's base. Third and fourth well regions are formed in the first and second transistors, respectively, and extend a different distance into the substrate than do the well regions of the first and second transistors. The third well region has a third lateral edge separated from the first lateral edge by a first spacing dimension D1. The fourth well region has a fourth lateral edge separated from the second lateral edge by a second spacing dimension D2, which is different than D1.
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