发明申请
- 专利标题: METHODS FOR PRODUCING STACKED ELECTROSTATIC DISCHARGE CLAMPS
- 专利标题(中): 用于生产堆积静电排放夹的方法
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申请号: US13561990申请日: 2012-07-30
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公开(公告)号: US20120295414A1公开(公告)日: 2012-11-22
- 发明人: Rouying Zhan , Amaury Gendron , Chai Ean Gill
- 申请人: Rouying Zhan , Amaury Gendron , Chai Ean Gill
- 申请人地址: US TX Austin
- 专利权人: FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人: FREESCALE SEMICONDUCTOR, INC.
- 当前专利权人地址: US TX Austin
- 主分类号: H01L21/76
- IPC分类号: H01L21/76 ; H01L21/8222
摘要:
Methods are provided for producing stacked electrostatic discharge (ESD) clamps. In one embodiment, the method includes providing a semiconductor substrate in which first and second serially-coupled transistors are formed. The first transistor includes a first well region having a first lateral edge partially forming the first transistor's base. The second transistor including a second well region having a second lateral edge partially forming the second transistor's base. Third and fourth well regions are formed in the first and second transistors, respectively, and extend a different distance into the substrate than do the well regions of the first and second transistors. The third well region has a third lateral edge separated from the first lateral edge by a first spacing dimension D1. The fourth well region has a fourth lateral edge separated from the second lateral edge by a second spacing dimension D2, which is different than D1.
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