Invention Application
- Patent Title: METHOD FOR MANUFACTURING PHYSICAL QUANTITY DETECTOR, AND PHYSICAL QUANTITY DETECTOR
- Patent Title (中): 制造物理量检测器的方法和物理量检测器
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Application No.: US13477529Application Date: 2012-05-22
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Publication No.: US20120304769A1Publication Date: 2012-12-06
- Inventor: Jun WATANABE , Kazuyuki NAKASENDO , Takahiro KAMETA
- Applicant: Jun WATANABE , Kazuyuki NAKASENDO , Takahiro KAMETA
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2011-120050 20110530
- Main IPC: G01P15/00
- IPC: G01P15/00 ; B23P17/04

Abstract:
A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.
Public/Granted literature
- US09188600B2 Method for manufacturing physical quantity detector, and physical quantity detector Public/Granted day:2015-11-17
Information query