Invention Application
US20120304769A1 METHOD FOR MANUFACTURING PHYSICAL QUANTITY DETECTOR, AND PHYSICAL QUANTITY DETECTOR 有权
制造物理量检测器的方法和物理量检测器

METHOD FOR MANUFACTURING PHYSICAL QUANTITY DETECTOR, AND PHYSICAL QUANTITY DETECTOR
Abstract:
A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.
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