Invention Application
US20120305764A1 METHOD OF DETERMINING THE CONCAVITY AND CONVEXITY ON SAMPLE SURFACE, AND CHARGED PARTICLE BEAM APPARATUS
审中-公开
确定样品表面的浓度和渗透率的方法和带电粒子束装置
- Patent Title: METHOD OF DETERMINING THE CONCAVITY AND CONVEXITY ON SAMPLE SURFACE, AND CHARGED PARTICLE BEAM APPARATUS
- Patent Title (中): 确定样品表面的浓度和渗透率的方法和带电粒子束装置
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Application No.: US13570931Application Date: 2012-08-09
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Publication No.: US20120305764A1Publication Date: 2012-12-06
- Inventor: Yoshihiro Kimura , Osamu Komuro , Fumihiro Sasajima
- Applicant: Yoshihiro Kimura , Osamu Komuro , Fumihiro Sasajima
- Priority: JP2003-040494 20030219
- Main IPC: G01N23/225
- IPC: G01N23/225
Abstract:
A method and apparatus suitable for determining the concavity and convexity of line and space patterns formed on a sample. A profile is formed based on a charged-particle beam scan, the profile having a peak. When one foot portion of the peak converges more gradually than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a convex portion. Alternatively, when one foot portion of the peak converges more steeply than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a concave portion.
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