发明申请
US20120305764A1 METHOD OF DETERMINING THE CONCAVITY AND CONVEXITY ON SAMPLE SURFACE, AND CHARGED PARTICLE BEAM APPARATUS
审中-公开
确定样品表面的浓度和渗透率的方法和带电粒子束装置
- 专利标题： METHOD OF DETERMINING THE CONCAVITY AND CONVEXITY ON SAMPLE SURFACE, AND CHARGED PARTICLE BEAM APPARATUS
- 专利标题（中）： 确定样品表面的浓度和渗透率的方法和带电粒子束装置
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申请号： US13570931申请日： 2012-08-09
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公开(公告)号： US20120305764A1公开(公告)日： 2012-12-06
- 发明人: Yoshihiro Kimura , Osamu Komuro , Fumihiro Sasajima
- 申请人： Yoshihiro Kimura , Osamu Komuro , Fumihiro Sasajima
- 优先权： JP2003-040494 20030219
- 主分类号： G01N23/225
- IPC分类号： G01N23/225
摘要：
A method and apparatus suitable for determining the concavity and convexity of line and space patterns formed on a sample. A profile is formed based on a charged-particle beam scan, the profile having a peak. When one foot portion of the peak converges more gradually than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a convex portion. Alternatively, when one foot portion of the peak converges more steeply than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a concave portion.
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