Invention Application
- Patent Title: PROCESS FOR FABRICATING A BACKSIDE-ILLUMINATED IMAGING DEVICE AND CORRESPONDING DEVICE
- Patent Title (中): 背景照明成像装置和相关装置的制作方法
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Application No.: US13483274Application Date: 2012-05-30
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Publication No.: US20120306035A1Publication Date: 2012-12-06
- Inventor: Francois Roy , Francois Leverd , Jens Prima
- Applicant: Francois Roy , Francois Leverd , Jens Prima
- Applicant Address: FR Crolles Cedex
- Assignee: STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee: STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee Address: FR Crolles Cedex
- Priority: FR1154895 20110606
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/18

Abstract:
An integrated imaging device includes a silicon layer provided over a dielectric multilayer. The dielectric multilayer includes a top silicon-dioxide layer, an intermediate silicon-nitride layer and a bottom silicon-dioxide layer. Imaging circuitry is formed at a frontside of the silicon layer. An isolating structure surrounds the imaging circuitry and extends from the frontside through the silicon layer and top silicon-dioxide layer into and terminating within the intermediate silicon-nitride layer. A filter for the imaging circuitry is mounted to a backside of the bottom silicon-dioxide layer. The isolating structure is formed by a trench filled with a dielectric material.
Public/Granted literature
- US08847344B2 Process for fabricating a backside-illuminated imaging device and corresponding device Public/Granted day:2014-09-30
Information query
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