发明申请
- 专利标题： Thermally Assisted Magnetic Recording Head Inspection Method and Apparatus
- 专利标题（中）： 热辅助磁记录头检测方法和装置
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申请号： US13482065申请日： 2012-05-29
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公开(公告)号： US20120307605A1公开(公告)日： 2012-12-06
- 发明人: Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
- 申请人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 优先权： JP2011-119881 20110530; JP2012-116362 20120522
- 主分类号： G11B13/04
- IPC分类号： G11B13/04
摘要：
In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.
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