Invention Application
- Patent Title: METHODS OF AND HYBRID FACTORIES FOR THIN-FILM BATTERY MANUFACTURING
- Patent Title (中): 薄膜电池制造和混合工艺方法
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Application No.: US13157651Application Date: 2011-06-10
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Publication No.: US20120312474A1Publication Date: 2012-12-13
- Inventor: Byung-Sung Kwak , Stefan Bangert , Dieter Haas , Omkaram Nalamasu
- Applicant: Byung-Sung Kwak , Stefan Bangert , Dieter Haas , Omkaram Nalamasu
- Main IPC: C23F1/08
- IPC: C23F1/08 ; C23C16/448

Abstract:
Methods of and hybrid factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A hybrid factory includes one or more tool sets for fabricating a thin-film battery.
Public/Granted literature
- US09130238B2 Methods of and hybrid factories for thin-film battery manufacturing Public/Granted day:2015-09-08
Information query
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