Invention Application
US20120312474A1 METHODS OF AND HYBRID FACTORIES FOR THIN-FILM BATTERY MANUFACTURING 有权
薄膜电池制造和混合工艺方法

METHODS OF AND HYBRID FACTORIES FOR THIN-FILM BATTERY MANUFACTURING
Abstract:
Methods of and hybrid factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A hybrid factory includes one or more tool sets for fabricating a thin-film battery.
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