Invention Application
- Patent Title: WIRING STRUCTURES
- Patent Title (中): 接线结构
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Application No.: US13495216Application Date: 2012-06-13
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Publication No.: US20120318567A1Publication Date: 2012-12-20
- Inventor: Jong-Hyun PARK , Jee-Yong KIM , Joon-Hee LEE , Jai-Hyuk SONG , Sang-Youn JO
- Applicant: Jong-Hyun PARK , Jee-Yong KIM , Joon-Hee LEE , Jai-Hyuk SONG , Sang-Youn JO
- Priority: KR10-2011-0058283 20110616
- Main IPC: H05K1/11
- IPC: H05K1/11 ; H05K1/02 ; H05K1/09

Abstract:
A wiring structure includes a first plug extending through a first insulating interlayer on a substrate, a first wiring extending through a second insulating interlayer on the first insulating interlayer and the first wiring is electrically connected to the first plug, a diffusion barrier layer pattern on the first wiring and on the second insulating interlayer, a portion of the second insulating interlayer being free of being covered by the diffusion barrier layer pattern, a second plug extending through the diffusion barrier layer pattern, the second plug is in contact with the first wiring, and a second wiring electrically connected to the second plug.
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