Invention Application
US20120319527A1 MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES
有权
微电子机械系统（MEMS）及相关执行机构的制造，制造和设计结构的方法
- Patent Title: MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS, METHODS OF MANUFACTURE AND DESIGN STRUCTURES
- Patent Title (中): 微电子机械系统（MEMS）及相关执行机构的制造，制造和设计结构的方法
-
Application No.: US13164323Application Date: 2011-06-20
-
Publication No.: US20120319527A1Publication Date: 2012-12-20
- Inventor: Christopher V. JAHNES , Anthony K. STAMPER
- Applicant: Christopher V. JAHNES , Anthony K. STAMPER
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H02N1/00
- IPC: H02N1/00 ; H05K13/00
Abstract:
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode. The method further includes forming a MEMS beam above the wiring layer. The method further includes forming at least one spring attached to at least one end of the MEMS beam. The method further includes forming an array of mini-bumps between the wiring layer and the MEMS beam.
Public/Granted literature
- US08973250B2 Methods of manufacturing a micro-electro-mechanical system (MEMS) structure Public/Granted day:2015-03-10
Information query
