发明申请
US20120323350A1 SUPPORT SYSTEM FOR SETTING EQUIPMENT PARAMETERS 审中-公开
用于设置设备参数的支持系统

SUPPORT SYSTEM FOR SETTING EQUIPMENT PARAMETERS
摘要:
An object is to provide an equipment parameter setting support system for supporting the setting of parameters in various processing equipment. The equipment parameter setting support system has an execution results acquisition unit for acquiring, from an equipment controller or EES of the equipment design and manufacturing support system, execution results of a real equipment at any two points in time; a parameter calculation unit for calculating PID parameters at each time point on the basis of the acquired execution results; a difference calculation unit for calculating the difference between the calculated PID parameters; and a variation value calculation unit for calculating a variation value for a unit interval in relation to the calculated difference, wherein, in the equipment design and manufacturing support system, the calculated variation value and a PID parameters stored in the equipment simulator are computed to calculate a new PID parameter, and PID control is executed in the equipment simulator using the new PID parameter.
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