发明申请
- 专利标题: Plasma Processing Apparatus
- 专利标题(中): 等离子体处理装置
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申请号: US13521467申请日: 2011-02-04
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公开(公告)号: US20120325146A1公开(公告)日: 2012-12-27
- 发明人: Hiroyuki Kobayashi , Kenji Maeda , Takumi Tandou , Shoichi Nakashima , Shigeru Ohno
- 申请人: Hiroyuki Kobayashi , Kenji Maeda , Takumi Tandou , Shoichi Nakashima , Shigeru Ohno
- 申请人地址: JP Chiyoda-ku
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Chiyoda-ku
- 优先权: JP2010-056909 20100315
- 国际申请: PCT/JP2011/052344 WO 20110204
- 主分类号: C23C16/50
- IPC分类号: C23C16/50 ; C23C16/52
摘要:
Disclosed is a plasma processing apparatus which performs plasma processing under substantially atmospheric pressure to a non-planar subject to be processed. In the plasma processing apparatus, a pair of conductive wires are disposed at an interval of 1 mm or less on a dielectric board that conforms with the shape of the subject, the conductive wires are covered with a dielectric thin film having a thickness of 1 mm or less by, for instance, thermally spraying a dielectric material over the conductive wires, and plasma is generated along the shape of subject by applying high-frequency power to the pair of conductive wires.