Invention Application
- Patent Title: Apparatus and Method for Producing Microcomponents and Use Of
- Patent Title (中): 用于生产微量元件和使用的装置和方法
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Application No.: US13599985Application Date: 2012-08-30
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Publication No.: US20120325264A1Publication Date: 2012-12-27
- Inventor: Josef MATHUNI
- Applicant: Josef MATHUNI
- Applicant Address: DE Taufkirchen
- Assignee: R3T GmbH Rapid Reactive Radicals Technology
- Current Assignee: R3T GmbH Rapid Reactive Radicals Technology
- Current Assignee Address: DE Taufkirchen
- Priority: DE102007059717.9 20071212
- Main IPC: B08B7/00
- IPC: B08B7/00 ; B08B13/00
Abstract:
An apparatus and the use of such an apparatus and method for producing microcomponents with component structures are presented which are generated in a process chamber on a substrate according to the LIGA method for example and are stripped from the enclosing photoresist with the help of a cooled remote plasma source.
Public/Granted literature
- US08815746B2 Apparatus and method for producing microcomponents and use of Public/Granted day:2014-08-26
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